The Future of Lithography - How Far Could We Go?
By Yu Cao (MS ‘91, PhD ‘97)
Lithography is the crux in making ever smaller devices and driving Moore’s Law. Currently, the leading-edge technology is 7 nm. How much smaller could we go? Have we pushed lithography to its limit? In this talk, I will discuss the basics of lithography in semiconductor manufacturing. I will also talk about computational lithography, specifically covering its technology, history, and future trends.
Yu is a co-founder and GM of Brion. Brion develops solutions and products in computational lithography, and is a wholly-owned subsidiary of ASML, the world’s leading supplier of photolithography systems. Yu started his career at KLA-Tencor, before co-founding Brion in 2002 and architecting the lithography modeling and simulation algorithms. In 2007, Brion was acquired by ASML, where Yu led the development of new product applications of computational lithography in the fab. In 2011, Yu left ASML to co-found Founton Technologies, a digital advertising company. In 2014, Founton was acquired by Alibaba, where Yu led the Silicon Valley team of Alibaba’s Institute of Data Science and Technologies. In 2015, Yu returned to Brion as their GM.
Yu received his M.S. and Ph.D. in Physics from Caltech in 1991 and 1997, and his BS from the University of Science and Technology of China in 1989. Yu holds over 40 US patents.
Price increases to $22 because of Baylands. Price includes lunch, tax and gratuity
$5.00 for those not eating the buffet (Please state “not eating” after your name when you register)